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Fine silicon powder synthesis by the laser induced reaction

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Fine silicon particles were produced by a continuous wave CO2 laser driven reaction of SiH4. X-ray diffraction patterns of silicon particles produced indicated that particles with a highly crystalline structure could be obtained through high power laser beam irradiation. The size distribution was measured by the photo-extinction sedimentation method. The mean size of the particles was 50-200 nm depending on the operating conditions, laser power density, the reactant gas pressure and the reactant gas flow rate. The size distributions obeyed a log-normal relation and the geometric standard deviation was 1.7-1.9. The mean size increased with increasing laser power density, gas pressure and flow rate of SiH4. The increase of the mean size was influenced by collision and coalescence between the particles.

Affiliations: 1: National Research Institute for Pollution and Resources, 16-3 Onogawa, Tsukuba-shi, Ibaraki 305, Japan; 2: The Institute of Physical and Chemical Research, 2-1 Hirosawa, Wako-shi, Saitama 351-01, Japan


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