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Comparison of moving bed reactors for chemical vapor deposition coating of fine particles

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—New co-current and counter-current types of moving-bed reactor were devised for the coating of Si3N4 ultra-fine particles in the form of agglomerates by chemical vapor deposition of AlN. An experimental parametric study has been undertaken on the effects of operational conditions on total quantity of deposited AlN inside the agglomerates. As a result, the increase in the quantity of deposit was yielded by increasing reaction temperature, inlet concentration of AlCl3 reaction gas and solids residence time, and by decreasing the agglomerate size. Comparison of counter-current and co-current arrangements of the moving bed reactor revealed that the outlet conversion of Si3N4 particles to their composite with AlN in the co-current type of reactor is slightly lower than that in the counter-current one according to the numerical simulation based on the experiments.

Affiliations: 1: Division of Materials Science and Engineering, Graduate School of Engineering, Hokkaido Universiy, Sapporo 060-8628, Japan


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