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IR and UV Laser-Induced Decomposition of Organosilanes for Cvd of Si/C/h pHases

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Infrared multiphoton decomposition and UV laser photolysis of organosilanes RSiH3 (R= H2C=CH, HC=C, ClHC=CH and H2C=CHCH2), (H2C=CH)2SiH2 and H3SiCH2CH2SiH3 yields a number of volatile products and affords solid materials the composition of which depends on the structure of the initial compound and the irradiation source. With IR radiation the deposited Si/C/H phases are composed of SiC and polycarbosilane, while with UV radiation they can be described as polycarbosilanes.

Affiliations: 1: Institute of Chemical Process Fundamentals, 165 02 Prague 6, Academy of Sciences of the Czech Republic, Czech Republic


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