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A Static Analysis of Snap Back in the Cantilever with Mems Adhesion

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image of Multidiscipline Modeling in Materials and Structures

The "Snap back" problem of the micro-cantilever remains one of the dominant failure mechanisms in the Micro Electro-mechanical System (MEMS). By analyzing the Hamaker micro continuum medium and solid physics principle, the consistency model of Wigner-Seitz (W-S) continuum medium is presented. The gap revision coefficients of the body with the face-centered cubic structure are derived, which include the attractive force and the repulsive one. The adhesion model of the 500 μ m × μ m silicon micro-cantilever coated by Au is established. The micro-cantilever static relationship between the elastic force and the adhesion force is discussed. The reason of the micro- cantilever "snap back" problem, an instable balanced point, is discovered. Increasing the rigidity of the micro-cantilever, a method to avoid the micro-cantilever "snap back" to happen, is put forward, which improves MEMS structure design and enhances MEMS reliability.

10.1163/157361106775249916
/content/journals/10.1163/157361106775249916
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/content/journals/10.1163/157361106775249916
2006-01-01
2016-12-11

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